| 摘要 |
PROBLEM TO BE SOLVED: To perform rough moving travel at high speed and minute moving travel by high resolution, miniaturize a feed screw unit, and achieve high precision of movement precision. SOLUTION: This feed screw unit 4 has a screw shaft 11 forming a screw channel 10 at the outer periphery, a nut 12 movable in the axial direction of the screw shaft 11 while screw-fitted into the screw channel 10, a first driving motor 13 for rotating the screw shaft 11 around axis through a first bearing part 17a, a second driving motor 14 for rotating the nut 12 around axis through a second bearing part 20a, a control part for controlling operation of the first driving motor 13 and the second driving motor 14, respectively, and a rotation amount adjusting means 15 for adjusting rotation of the screw shaft 11 and the nut 12 to reduce either of the minimum travel amount for moving the screw shaft 11 by rotating it by the first driving motor 13 and the minimum travel amount for moving the nut 12 by rotating it by the second driving motor 14 to such extent that either is smaller than the other. COPYRIGHT: (C)2006,JPO&NCIPI
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