| 摘要 |
PROBLEM TO BE SOLVED: To provide a slurry coating method which can obtain a stable coating state in a short time while suppressing a slurry loss or a carrier film loss and improve yield and productivity and a slurry coating device. SOLUTION: In the slurry coating method, an opening 4a is formed in a slurry chamber 3 filled with the slurry 2, and the slurry 2 is applied on a carrier film 5 by making the carrier film 5 touch the opening 4a slidingly while the film 5 is conveyed in one way. The pressure of the slurry 2 packed in the slurry chamber 3 is detected, and the conveyance of the carrier film 5 is started when the detected pressure reaches prescribed set conditions. COPYRIGHT: (C)2006,JPO&NCIPI
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