Process for recovering rare gases using gas-recovering container

摘要

A process comprises the steps of recovering exhaust gas containing krypton or xenon which are used as an atmospheric gas for semiconductor product preparation apparatuses; introducing the exhaust gas to separating and purifying equipment and thereby separating and purifying krypton or xenon from the exhaust gas, wherein the former step of recovering a rare gas-containing exhaust gas discharged from an equipment using a rare gas comprises removing one or more interfering gases which lower(s) the adsorption ability of activated carbon capable of adsorbing rare gases; and thereafter pressure filling the rare gas-containing exhaust gas obtained after said one or more interfering gases removal treatment into a gas-recovering container, which comprises a air-tight container having a joint section capable of connecting a gas duct through an on-off valve and containing therein the activated carbon capable of adsorbing rare gases; and thereby recovering the rare gas containing exhaust gas; and the latter step of introducing the recovered rare gas-containing exhaust gas in the gas-recovering container to rare gas separating and purifying equipment comprises desorbing the rare gas adsorbed on the above activated carbon by reducing the pressure of the inside of the above gas-recovering container; and discharging the rare gases desorbed from the gas-recovering container and introducing to the above rare gas separation and purifying equipment.