IMAGING SEMICONDUCTOR STRUCUTURES USING SOLID STATE ILLUMINATION
摘要
The invention consists of a camera, light sources, lenses and software algorithms that are used to image and inspect semiconductor structures, including through infrared radiation. The use of various configurations of solid state lighting and software algorithms enhances the imaging and inspection.
申请公布号
WO2005100961(A2)
申请公布日期
2005.10.27
申请号
WO2005US13448
申请日期
2005.04.19
申请人
PHOSEON TECHNOLOGY, INC.;OWEN, MARK, D.;VLACH, FRANCOIS;OLSON, STEVEN, J.
