| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron gun for a sample observation device capable of using an acceleration power supply with small current supply capability and not requiring an unnecessary load current in acceleration. SOLUTION: This electron gun is provided with a negative electrode emitting electrons, an extracting electrode extracting the electrons from the negative electrode, an accelerating electrode accelerating the emitted electron beam, a load resistance connected between the accelerating electrode and the earth, and a power supply for the load current connected with the load resistance in series. COPYRIGHT: (C)2006,JPO&NCIPI
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