| 摘要 |
PROBLEM TO BE SOLVED: To provide an economical manufacturing method of an envelope with high freedom of processing and easy process control. SOLUTION: The manufacturing method of the envelope formed by sealing a first member and a second member having a vacuum space at its inside comprises a baking process (3-1) simultaneously or independently baking the first member 3 and the second member 2 in vacuum, a transporting process (3-2) simultaneously or independently transporting the baked first member and second member from a first chamber to a second chamber in an atmosphere in which the temperature of the air having a prescribed dew point exceeds the dew point, and a sealing process (3-3) forming the envelope by sealing the first member and the second member in vacuum in the second chamber. COPYRIGHT: (C)2006,JPO&NCIPI
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