| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscope apparatus, realizing observation by laser beam total reflection or observation by white light total reflection or observation by incident-light illumination of white light, using a single apparatus. SOLUTION: The illuminator for illuminating a sample through an objective G6 has a laser beam illumination optical system 2 and a white light illumination optical system 4. The laser beam illumination optical system 2 emits laser total reflection illuminating light to the sample O, and the white light illumination optical system 4 emits white light of incident-light illumination or white light total reflection illuminating light to the sample O. Then, the illuminator has a switching means M2 for irradiating the sample, with at least one illuminating light from among the laser total reflection illuminating light, the white light of incident-light illumination and the white light total reflection illuminating light. COPYRIGHT: (C)2006,JPO&NCIPI
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