| 摘要 |
A three-dimensional structure element having a plurality of three-dimensional structural bodies and capable of being uniformly formed without producing a dispersion in shape of the three-dimensional structural bodies, comprising a substrate ( 11 ) and the three-dimensional structural bodies ( 1 ) disposed in a predetermined effective area ( 20 ) on the substrate ( 11 ), the three-dimensional structural bodies ( 1 ) further comprising space parts formed in the clearances thereof from the substrate ( 11 ) by removing sacrificing layers, the substrate ( 11 ) further comprising a dummy area ( 21 ) having dummy structural bodies ( 33 ) so as to surround the effective area ( 20 ), the dummy structural body ( 33 ) further comprising space parts formed in the clearances thereof from the substrate ( 11 ) by removing the sacrificing layers, whereby since the dummy area ( 21 ) is heated merely to approx. the same temperature as the effective area ( 20 ) in an ashing process for removing the sacrificing layers to prevent a temperature distribution from occurring in the effective area ( 20 ).
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