发明名称 |
Method for making a microelectromechanical system using a flexure protection layer |
摘要 |
A microelectromechanical system is made by establishing a flexure protection layer over a portion of at least one flexure which is located on a substrate. The flexure protection layer is deposited such that a portion of the flexure is left exposed. Contact is established between a flexure-engaging element and the exposed portion of the flexure. The remaining flexure protection layer is removed after the flexure-engaging element is patterned and etched.
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申请公布号 |
US2005239231(A1) |
申请公布日期 |
2005.10.27 |
申请号 |
US20040833203 |
申请日期 |
2004.04.27 |
申请人 |
PRZYBYLA JAMES R;PIEHL ARTHUR R |
发明人 |
PRZYBYLA JAMES R.;PIEHL ARTHUR R. |
分类号 |
B81B3/00;G11B5/48;G11B21/16;H01L21/00;(IPC1-7):H01L21/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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