Ferroelectric film laminated body, ferroelectric memory, piezoelectric element, liquid jet head, and printer

摘要

To provide ferroelectric film laminated bodies with few crystal defects and having excellent characteristics. A ferroelectric film laminated body includes an electrode and a PZT system ferroelectric film formed on the electrode. In the ferroelectric film, Nb replaces Ti composition by 2.5 mol % or more but 40 mol % or less, and the electrode does not include almost any oxygen that diffuses from the ferroelectric film.