| 发明名称 |
METHOD AND APPARATUS FOR LOCAL FLUORINE AND NITROGEN TRIFLUORIDE PRODUCTION |
| 摘要 |
The present invention relates to a process for production, shipment, and treatment of a NH4F(HF)x feedstock for local production of fluorine and NF3 for semiconductor chamber cleaning without the need for storage of large quantities of dangerous feeds and intermediate products. |
| 申请公布号 |
WO2005100643(A2) |
申请公布日期 |
2005.10.27 |
| 申请号 |
WO2005US11688 |
申请日期 |
2005.04.05 |
| 申请人 |
THE BOC GROUP, INC.;SATCHELL, DONALD, P., JR. |
发明人 |
SATCHELL, DONALD, P., JR. |
| 分类号 |
C01B7/20;C01B21/083;C25F1/00 |
主分类号 |
C01B7/20 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
