摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a high-luminance line type light irradiation optical device, and to provide a method of manufacturing a light irradiation optical device inexpensively. <P>SOLUTION: An optical waveguide array structure to be a start structure is made by polishing a cover 22. The polishing can be carried out by the CMP method. The polishing removes the cover 22 all by polishing and polishes to near the center of an optical fiber structure 6. Thereafter, an organic EL structure to be a light emitting layer 14 is formed via a refractive index adjustment layer 12 on a polished flat face by a size to agree with a pitch of the optical fiber structure 6. A driving circuit 16 is formed between the light emitting layers 14. A transparent conductive film 18 and a cap layer 20 are formed on the light emitting layers 14 and the driving circuits 16. Then, the optical waveguide array structure is cut to a desired length, and both end faces of the optical waveguide array structure are polished by the CMP method. One end face is made to be a light emission face. An aluminum film is formed to the other end face by the vapor deposition method, so that the other end face is made to be a reflecting face. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |