发明名称 Chemical treatment of material surfaces
摘要 A method for treating the surfaces of materials to improve wettability and adhesion of subsequently deposited polymer layers is disclosed. Suitable materials for practice of the method include polymeric materials and silicon-containing materials is disclosed. The method involves contacting at least a portion of the surface of the material with an aqueous solution of sulfuric acid or phosphoric acid, followed by rinsing with water. After the acid treatment, the contact angle of the surface decreases, and subsequently deposited polymer coatings easily wet the material's surface and exhibit enhanced adhesion. The method may be used to fabricate useful structures, such as semiconductor structures, optical waveguide structures, and coated articles.
申请公布号 US2005239295(A1) 申请公布日期 2005.10.27
申请号 US20040832629 申请日期 2004.04.27
申请人 WANG PEI-L;LU TOH-MING;MURARKA SHYAM P;GHOSHAL RAMKRISHNA 发明人 WANG PEI-L;LU TOH-MING;MURARKA SHYAM P.;GHOSHAL RAMKRISHNA
分类号 G02B6/138;H01L21/3105;H01L21/312;H05K3/36;(IPC1-7):H05K3/36 主分类号 G02B6/138
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