发明名称 |
Layered components, materials, methods of production and uses thereof |
摘要 |
A layered component is described herein that includes: a substrate; a dielectric material having a plurality of pores, wherein the material is coupled to the substrate; and a self-assembled diffusion blocking material coupled to the dielectric material, wherein the diffusion blocking material is attracted to the dielectric material. A layered component is also described herein that includes: a substrate; a dielectric material having a plurality of pores, wherein the material is coupled to the substrate; and a self-assembled diffusion blocking material coupled to the dielectric material, wherein the diffusion blocking material reacts with the dielectric material. A layered material is described that includes: a) a porous material comprising a porous surface; and b) a layer of blocking material comprising reactive functionalities coupled to the porous surface, wherein the interaction of the reactive functionalities with the porous material forms a diffusion blocking layer. Methods are also described of minimizing the diffusion of metal atoms, reactive etchants or CVD/ALD precursor materials into a material having a plurality of pores are disclosed herein that include: a) providing a precursor material that comprises a carbon-including material; b) providing a solvent carrier solution; c) combining the precursor material and the solvent carrier solution to form a diffusion blocking reactive solution; and d) applying the diffusion blocking reactive solution to the material having a plurality of pores to form a diffusion blocking material.
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申请公布号 |
US2005238889(A1) |
申请公布日期 |
2005.10.27 |
申请号 |
US20040875050 |
申请日期 |
2004.06.22 |
申请人 |
IWAMOTO NANCY;KENNEDY JOSEPH;LEE EAL |
发明人 |
IWAMOTO NANCY;KENNEDY JOSEPH;LEE EAL |
分类号 |
B32B3/26;B32B9/04;C07C13/28;H01L21/31;H01L21/316;H01L21/768;H05K1/03;H05K1/16;H05K3/00;(IPC1-7):B32B9/04 |
主分类号 |
B32B3/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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