发明名称 Layered components, materials, methods of production and uses thereof
摘要 A layered component is described herein that includes: a substrate; a dielectric material having a plurality of pores, wherein the material is coupled to the substrate; and a self-assembled diffusion blocking material coupled to the dielectric material, wherein the diffusion blocking material is attracted to the dielectric material. A layered component is also described herein that includes: a substrate; a dielectric material having a plurality of pores, wherein the material is coupled to the substrate; and a self-assembled diffusion blocking material coupled to the dielectric material, wherein the diffusion blocking material reacts with the dielectric material. A layered material is described that includes: a) a porous material comprising a porous surface; and b) a layer of blocking material comprising reactive functionalities coupled to the porous surface, wherein the interaction of the reactive functionalities with the porous material forms a diffusion blocking layer. Methods are also described of minimizing the diffusion of metal atoms, reactive etchants or CVD/ALD precursor materials into a material having a plurality of pores are disclosed herein that include: a) providing a precursor material that comprises a carbon-including material; b) providing a solvent carrier solution; c) combining the precursor material and the solvent carrier solution to form a diffusion blocking reactive solution; and d) applying the diffusion blocking reactive solution to the material having a plurality of pores to form a diffusion blocking material.
申请公布号 US2005238889(A1) 申请公布日期 2005.10.27
申请号 US20040875050 申请日期 2004.06.22
申请人 IWAMOTO NANCY;KENNEDY JOSEPH;LEE EAL 发明人 IWAMOTO NANCY;KENNEDY JOSEPH;LEE EAL
分类号 B32B3/26;B32B9/04;C07C13/28;H01L21/31;H01L21/316;H01L21/768;H05K1/03;H05K1/16;H05K3/00;(IPC1-7):B32B9/04 主分类号 B32B3/26
代理机构 代理人
主权项
地址