发明名称 |
POSITIVE RESIST COMPOSITION AND PROCESS FOR THE FORMATION OF RESIST PATTERNS |
摘要 |
<p>A positive resist composition comprising (A) a resin component and (B) an acid generator component, wherein the resin component (A) is a copolymer comprising structural units (a1) derived from an (alpha-lower alkyl)acrylic ester having an acid -dissociable dissolution-inhibiting group containing a mono- or poly-cyclic group, structural units (a2) derived from an (alpha-lower alkyl)acrylic ester having a lactone ring, structural units (a3) derived from an (alpha-lower alkyl)acrylic ester having a polycyclic group containing a polar group, and structural units (a4) represented by the general formula (1).</p> |
申请公布号 |
WO2005101128(A1) |
申请公布日期 |
2005.10.27 |
申请号 |
WO2005JP06865 |
申请日期 |
2005.04.07 |
申请人 |
TOKYO OHKA KOGYO CO., LTD.;SHIMIZU, HIROAKI;IWAI, TAKESHI |
发明人 |
SHIMIZU, HIROAKI;IWAI, TAKESHI |
分类号 |
C08F220/10;C08F220/18;C08F220/28;G03F7/033;G03F7/039;H01L21/027;(IPC1-7):G03F7/039 |
主分类号 |
C08F220/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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