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摘要
申请公布号
JP3711148(B2)
申请公布日期
2005.10.26
申请号
JP19990501245
申请日期
1998.04.24
申请人
发明人
分类号
F02M51/06;F02D41/20;F02D41/30;F16K31/06;H01L41/04;H01L41/09;H02N2/06;(IPC1-7):H01L41/09
主分类号
F02M51/06
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