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发明名称
ANALYSIS AND MONITORING OF STRESSES IN EMBEDDED LINES AND VIAS INTEGRATED ON SUBSTRATES
摘要
申请公布号
EP1588254(A2)
申请公布日期
2005.10.26
申请号
EP20040705650
申请日期
2004.01.27
申请人
CALIFORNIA INSTITUTE OF TECHNOLOGY
发明人
ROSAKIS, ARES J.;PARK, TAE-SOON;SURESH, SUBRA
分类号
B81C99/00;G01B9/02;G06F7/60;G06F17/10;G06G7/48;G06G7/50;H01L;H01L21/66;H01L21/768;(IPC1-7):G06F7/60
主分类号
B81C99/00
代理机构
代理人
主权项
地址
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