发明名称 |
PLASMA GENERATING ELECTRODE ASSEMBLY |
摘要 |
<p>A plasma glow discharge and/or dielectric barrier discharge generating assembly (1) comprising at least one pair of substantially equidistant spaced apart electrodes (2), the spacing between the electrodes being adapted to form a plasma zone (8) upon the introduction of a process gas and enabling passage, where required, of gaseous, liquid and/or solid precursor(s) characterized in that at least one of the electrodes (2) comprises a housing (20) having an inner (5) and outer (6) wall, wherein the inner wall (5) is formed from a non-porous dielectric material, and which housing (20) substantially retains an at least substantially non-metallic electrically conductive material.</p> |
申请公布号 |
EP1588592(A1) |
申请公布日期 |
2005.10.26 |
申请号 |
EP20040705817 |
申请日期 |
2004.01.28 |
申请人 |
DOW CORNING IRELAND LIMITED |
发明人 |
SWALLOW, FRANK;DOBBYN, PETER |
分类号 |
H05H1/24;(IPC1-7):H05H1/24 |
主分类号 |
H05H1/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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