发明名称 |
SOI STRUCTURE COMPRISING SUBSTRATE CONTACTS ON BOTH SIDES OF THE BOX, AND METHOD FOR THE PRODUCTION OF SUCH A STRUCTURE |
摘要 |
Disclosed are an arrangement and a production method for electrically connecting ( 20 ) active semiconductor structures ( 40 ) in the monocrystalline silicon layer ( 12 ) located on the front face of silicon-on-insulator semiconductor wafers (SOI; 10 ) to the substrate ( 13 ) located on the rear side and additional structures ( 13 a) that are disposed therein. The electric connection is made through the insulator layer ( 11 ). |
申请公布号 |
EP1588418(A1) |
申请公布日期 |
2005.10.26 |
申请号 |
EP20040706606 |
申请日期 |
2004.01.30 |
申请人 |
X-FAB SEMICONDUCTOR FOUNDRIES AG |
发明人 |
RICHTER, STEFFEN;NUERNBERGK, DIRK;GOETTLICH, WOLFGANG |
分类号 |
H01L21/84;H01L27/12 |
主分类号 |
H01L21/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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