| 摘要 |
PROBLEM TO BE SOLVED: To provide the wafer inspecting device which can prevent a wafer from being contaminated by a checker. SOLUTION: A partition wall member 18 is provided between a macroinspection part 13 and a microinspection part 14, and the checker 17. Here, the macroinspection of the surface of the wafer 16 with the eyes of the checker 17 is performed through a window part 20 which is provided at part of the partition wall member 18 and has a transparent member 201 fitted in. Further, local microinspection on the wafer 16 through a wafer microscope 142 is carried out by peeping in the ocular part 1421 of the wafer microscope 142 provided penetrating the partition wall member 18 to the outside. |
