Optical modulator, method of achieving velocity matching and impedance matching of optical modulator, and method of manufacturing optical modulator

摘要

A Mach-Zehnder optical waveguide is disposed in a substrate made of a material having an electro-optic effect. Coplanar-waveguide modulating electrodes are disposed on a principal surface of the substrate. A dielectric layer is disposed on a reverse surface of the substrate. A supporting substrate having a recess is disposed in contact with the dielectric layer such that the recess is located at a position corresponding to a modulating region. The relationship: ∈_r>∈_s is satisfied where ∈_r represents the dielectric constant of the supporting substrate and ∈_s represents the dielectric constant of the dielectric constant of solid, liquid, or gaseous substance in the recess.