METHOD OF, AND APPARATUS FOR, MAGNETRON SPUTTERING,申请号KR19990050645-传众专利搜索

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发明名称	METHOD OF, AND APPARATUS FOR, MAGNETRON SPUTTERING
摘要
申请公布号	KR100523203(B1)	申请公布日期	2005.10.21
申请号	KR19990050645	申请日期	1999.11.15
申请人		发明人
分类号	C23C14/35;H01L21/36;(IPC1-7):H01L21/36	主分类号	C23C14/35
代理机构		代理人
主权项
地址

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