| 发明名称 |
MICROMECHANICAL RESONATOR DEVICE AND METHOD OF MAKING A MICROMECHANICAL DEVICE |
| 摘要 |
A micromechanical resonator device and a method of making the micromechanical resonator device, as well as other extensional mode devices are provided wherein anchor losses are minimized by anchoring at one or more side nodal points of the resonator device. Lower damping forces are experienced by the resonator device when operated in air.
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| 申请公布号 |
KR20050101313(A) |
申请公布日期 |
2005.10.21 |
| 申请号 |
KR20057011023 |
申请日期 |
2005.06.16 |
| 申请人 |
THE REGENTS OF THE UNIVERSITY OF MICHIGAN |
发明人 |
NGUYEN CLARK T. C.;ABDELMONEUM MOHAMED A. |
| 分类号 |
H03H3/007;H03H9/24;(IPC1-7):H03H9/02;H03H3/00 |
主分类号 |
H03H3/007 |
| 代理机构 |
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代理人 |
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