| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical displacement measuring device capable of realizing highly accurate measurement. SOLUTION: Photodiodes 21A, 21B, 21AA, 21BB constituted of a p-type semiconductor substrate 27 and n<SP>+</SP>-type impurity domains 31 can output electric signals of the A-phase, the B-phase, the AA-phase and the BB-phase, respectively. A polysilicon pattern 63 which is a shielding pattern is formed on the semiconductor substrate 27 between adjacent impurity domains 31 so that one translucent part 43 is arranged on one impurity domain 31. The impurity domains 31 are formed in the self-aligning state by utilizing the polysilicon pattern 63. COPYRIGHT: (C)2006,JPO&NCIPI
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