MICROSWITCHING ELEMENT, AND MANUFACTURING METHOD OF THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a microswitching element suitable for reducing the insertion loss at closed state, and to provide a manufacturing method of the same. SOLUTION: The microswitching element X1 is composed of a base plate; a movable part 110 having an anchor part 111 jointed to the base plate and an extended part 112 extending from the anchor part 111, facing the base plate; a contact part 131, formed on the extended part 112 on the opposite side of the base plate; and a pair of fixed contact electrodes 132, having a contact part facing the contact part 131 and fixed to the base plate, respectively. COPYRIGHT: (C)2006,JPO&NCIPI