| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inexpensive vibration damping-vibration resistant device easy in handling, and having both vibration resistant performance and vibration damping performance. <P>SOLUTION: This vibration damping-vibration resistant device has a damping means (an air cylinder 11, and a rubber damper 15) capable of selectively adding one damping force among first damping force and second damping force larger than the first damping force to vibration of a system composed of a sample chamber (an apparatus mounting table) 5 and an air spring 3, and a control means for adding the first damping force of the damping means to the system composed of the sample chamber 5 and the air spring 3 when performing vibration resistance and adding the second damping force of the damping means to the system composed of the sample chamber 5 and the air spring when performing vibration damping. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
