GAS SENSOR AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a gas sensor having a sufficiently high response speed, and to provide its manufacturing method.

SOLUTION: The gas sensor is constituted by providing a detection electrode 120 and a counter electrode on a substrate 110 containing a solid electrolyte. The detection electrode 120 has the metal layer 121 provided in contact with the substrate 110 and having a plurality of through-holes 121H formed so as to pierce therethrough and the metal oxide layer 122 provided on the metal layer 121 so as to contact with the substrate in the respective through-holes 121H of the metal layer 121 and having a plurality of through-holes 122H formed so as to pierce therethrough.

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