| 摘要 |
PROBLEM TO BE SOLVED: To obtain a high performance variable capacitor having a maximum capacity variation ratio against an intended absolute capacity by effectively utilizing a capacity component in the horizontal direction of the variable capacitor to regulate a structure of each diffusion layer composing the variable capacitor, and minimizing an increase in the area of the variable capacitor. SOLUTION: Units for forming an annular anode contact layer 2 around a cathode layer 1 are arranged in an array. Next, an interval 13 between the cathode layer 1 and an anode contact layer 2 is made even. Next, the interval 13 between the cathode layer 1 and the anode contact layer 2 forms a different plurality types of unit. An area ratio of the cathode layer 1 is in the range of an area of a side face/an area of base≈0.13. The interval 13 between the cathode layer 1 and the anode contact layer 2 is in a range of not less than the width of a depletion layer formed at the lowest voltage of a reverse bias used, and not more than the width of the depletion layer formed at the highest voltage. COPYRIGHT: (C)2006,JPO&NCIPI
|
