发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device which can have a high mechanical strength in a buried region of the semiconductor device and can lighten a stress/strain concentratedly generated in the periphery of the semiconductor element. SOLUTION: The semiconductor device comprises a semiconductor element, and a circuit wiring board which has a semiconductor element and an insulator of a porous structure having first and second main surfaces. At least part of the semiconductor element is buried between the first and second main surfaces. The density of the first region of the porous structure having the semiconductor element buried therein is higher than that of the second region of the porous structure having the semiconductor element not buried therein. And the density varies nearly continuously from the first region to the second region via an interface region between the first and second regions. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005294689(A) 申请公布日期 2005.10.20
申请号 JP20040109981 申请日期 2004.04.02
申请人 TOSHIBA CORP 发明人 YAMADA HIROSHI;HIRAOKA TOSHIRO;HOTTA YASUYUKI;MATAKE SHIGERU;YAMADA HIROSHI;SAWANOBORI MISA
分类号 H01L23/14;H01L23/12;(IPC1-7):H01L23/14 主分类号 H01L23/14
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