| 摘要 |
<P>PROBLEM TO BE SOLVED: To shorten an inspection time while restraining the number of using imaging devices. <P>SOLUTION: In this method/device for inspecting an inspected object 1, based on a difference between an inspected image 3a and a reference image 7a, a master image 4a including all the minimum repetition patterns of the inspected image 3a is prepared preliminarily, a place of the inspected image 3a is searched within the master image 4a, an area including a prescribed place in the searched master image 4a is extracted as a slaved image, and the difference between the reference image 7a and the inspected image 3a is detected using the slaved image as the reference image 7a with respect to the inspected image 3a. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
