| 发明名称 |
PATTERNED GRID ELEMENT POLARIZER |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a patterned grid polarizer having high transmission efficiency over an ultraviolet spectrum. <P>SOLUTION: The patterned grid polarizer for use in lithography comprises a substrate (a) transparent to ultraviolet (UV) light and an array (b) of elements patterned on the substrate and the elements polarize UV light. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
| 申请公布号 |
JP2005292835(A) |
申请公布日期 |
2005.10.20 |
| 申请号 |
JP20050103166 |
申请日期 |
2005.03.31 |
| 申请人 |
ASML HOLDING NV |
发明人 |
ALBERT MICHAEL M;SEWELL HARRY |
| 分类号 |
G02B5/30;G02B27/28;G03F7/20;H01L21/027 |
主分类号 |
G02B5/30 |
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