发明名称 PROBE
摘要 PROBLEM TO BE SOLVED: To provide a probe capable of attaining stable electric continuity to an electrode of a measuring object, even in the fine probe. SOLUTION: This probe 100 has a linear contact part 110 capable of contacting substantially vertically with the electrode 10 of the measuring object. The contact part 110 has a base part 111 (i.e. other portion) and a hardened part 111a (i.e. one part extended along a longitudinal direction of the contact part 110) joined to one side face of the base part 111. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005292019(A) 申请公布日期 2005.10.20
申请号 JP20040109626 申请日期 2004.04.02
申请人 JAPAN ELECTRONIC MATERIALS CORP 发明人 MACHIDA KAZUMICHI;SAKATA TERUHISA;MITSUNE ATSUSHI;URATA ATSUO
分类号 G01R31/26;G01R1/067;(IPC1-7):G01R1/067 主分类号 G01R31/26
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