发明名称 |
PROBE |
摘要 |
PROBLEM TO BE SOLVED: To provide a probe capable of attaining stable electric continuity to an electrode of a measuring object, even in the fine probe. SOLUTION: This probe 100 has a linear contact part 110 capable of contacting substantially vertically with the electrode 10 of the measuring object. The contact part 110 has a base part 111 (i.e. other portion) and a hardened part 111a (i.e. one part extended along a longitudinal direction of the contact part 110) joined to one side face of the base part 111. COPYRIGHT: (C)2006,JPO&NCIPI
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申请公布号 |
JP2005292019(A) |
申请公布日期 |
2005.10.20 |
申请号 |
JP20040109626 |
申请日期 |
2004.04.02 |
申请人 |
JAPAN ELECTRONIC MATERIALS CORP |
发明人 |
MACHIDA KAZUMICHI;SAKATA TERUHISA;MITSUNE ATSUSHI;URATA ATSUO |
分类号 |
G01R31/26;G01R1/067;(IPC1-7):G01R1/067 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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