X-RAY-USE TARGET AND DEVICE USING IT

摘要

An X-ray-use target having a micro focal point and capable of producing a high-luminance X-ray, and a device using it. The X-ray-use target (1) has a structure in which a first cap layer (21), a target layer (22) and a second cap layer (23) are sequentially laminated, and the first and second cap layers (21), (23) consist of a material lower in electron beam absorbing power than the target layer (22). An X-ray producing device using the X-ray-use target (1) can produce a high-luminance X-ray (17) having a micro focal point of several nanometers. A high-resolution transmission image can be obtained by an X-ray microscope using the X-ray producing device. Similarly, a micro-area X-ray diffraction image can be obtained by an X-ray diffraction device. In addition, a micro-area fluorescent X-ray analysis can be carried out by a fluorescent X-ray analyzer.