发明名称 CREEP CORRECTION METHOD AND DEVICE IN DRIVE MECHANISM USING PIEZOELECTRIC ELEMENT
摘要 <P>PROBLEM TO BE SOLVED: To solve a problem wherein, in the past, a sensor for reading an extension amount from a problem of creep and hysteresis and a feedback control system are necessary when a piezoelectric element is used as a positioning mechanism, a structure is complicated and its size is increased to cause a cost increase. <P>SOLUTION: In relation to the positioning mechanism using a piezoelectric element, this application provides a method and a device for stopping it by correcting creep and hysteresis without using a sensor for measuring an extension amount and a feedback system. The application comprises a control method for restoring a voltage to a target voltage by once overshooting it with respect to the target voltage to a targeted piezoelectric extension amount. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005293570(A) 申请公布日期 2005.10.20
申请号 JP20050070326 申请日期 2005.03.14
申请人 BONDOTEKKU:KK 发明人 YAMAUCHI AKIRA;OKADA MASUAKI
分类号 H01L41/083;G05D3/00;H02N2/00 主分类号 H01L41/083
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