| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gyro sensor capable of reducing the temperature dependency of a detection value compared with that in conventional constitution. <P>SOLUTION: A support substrate 2 of a glass substrate is layered with a main substrate 1 of a semiconductor substrate. The main substrate 1 includes a driven mass body 11 driven to be vibrated along a direction crossed with a surface of the support substrate 2, and a detected mass body 12 coupled to the driven mass body 11 via a driving spring 13, displaced within a plane along the support substrate 2, and for detecting a displacement amount. One-end parts of two detection springs 15 extended along a direction juxtaposed with the driven mass body 11 and the detected mass body 12 are connected to both side faces of the detected mass body 12, and the other-end parts of the both detection springs 15 are connected by a connection piece 16. A fixing piece 17 is provided in a longitudinal direction intermediate part of the connection piece 16, and the fixing piece 17 is joined to the support substrate 2. A member with the driven mass body 11 and the detected mass body 12 integrated by the driving spring 13 is thereby overhungly supported to the support substrate 2 by the detection springs 15 in a cantilevered manner. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
