LEAKAGE INSPECTION SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a leakage inspection system which can precisely perform leakage inspection in a short time.

SOLUTION: The leakage inspection system 1 is provided with: a regulator 2 for charging a fluid into a work 6; a flow rate sensor 10 for measuring the flow rate of the fluid flowing from the regulator 2 to the work 6; a bypass piping 91 for bypassing the flow rate sensor 10 and for supplying the fluid to the work 6; an open/shut valve 4 provided to the bypass piping 91; and a controller 7 for shutting the open/shut valve 4 when the flow rate value measured by the flow rate sensor 10 exceeds a preset threshold and then decreases below the threshold. When the open/shut valve 4 is shut by the controller 7 and when the output value of the flow rate sensor 10 is stabilized, the leakage of the work 6 is determined on the basis of the output value from the flow rate sensor 10.

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