| 摘要 |
PROBLEM TO BE SOLVED: To provide an anisotropic conductive sheet capable of obtaining superior conduction without damaging electrode terminals of a wafer, a conduction measuring instrument or the like due to applied load when the wafer of a semiconductor is tested. SOLUTION: This is the anisotropic conductive sheet 1 in which, on the inner wall of a plurality of through-holes 3 penetrating through an electrically insulating porous sheet 2 in the thickness direction, a layer of a porous resin such as a fluororubber having a continuous foamed structure or a tetrafluoroethylene-propylene copolymer rubber foamed and cross-linked by an electron beam or the like is installed, and in which a metal is covered on the skeleton surface of the porous resin. Furthermore, this is especially preferable for the porous resin. COPYRIGHT: (C)2006,JPO&NCIPI |
