发明名称 MAGNETIC MEMORY CELL ARRAY AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a magnetic memory cell array which has current lines having a lower resistance value, and is more highly integrated. SOLUTION: A MRAM array 1 has lower electrodes 23 formed on a substrate 21, a plurality of bit lines 2 which have a first region R1 divided along an X-axial direction, and a second region R2 with larger cross-sectional areas than those of the first region R1 respectively, and extend in parallel to each other in the X-axial direction, and a plurality of MTJ elements 24 arranged so that it may be inserted among them in each intersection of the lower electrodes 23 and the bit lines 2. Thereby, the bit lines 2 become a shape effectively utilizing the space corresponding to the disposition of other elements such as the MTJ elements 24, compared with that of having the uniform cross-sectional area, and the resistance can be reduced sufficiently in the X-axial direction. As a result, a high integration can be realized. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005294848(A) 申请公布日期 2005.10.20
申请号 JP20050106572 申请日期 2005.04.01
申请人 HEADWAY TECHNOLOGIES INC;APPLIED SPINTRONICS INC 发明人 WANG PO KANG;HONG LIUBO
分类号 H01L27/105;G11C11/22;H01L21/00;H01L21/8246;H01L27/22;H01L43/08;(IPC1-7):H01L27/105 主分类号 H01L27/105
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