摘要 |
PROBLEM TO BE SOLVED: To crystallize a semiconductor material in a short time by heating selectively and efficiently. SOLUTION: The semiconductor material is crystallized by heating in such a way that amorphous semiconductor material is irradiated with microwave. Since the semiconductor material has few carriers normally, a heating by the microwave is hard because the material is difficult to absorb the microwave, however, an irradiating with ultraviolet rays and visible light, which have energies more than a band gap of the semiconductor material, makes the heating by the microwave possible because carrier density increases. A photocatalyst consisting of anatase type titanium oxide can be manufactured by crystallizing amorphous titanium oxide in such a way that it is heated by microwave irradiation. COPYRIGHT: (C)2006,JPO&NCIPI
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