| 摘要 |
PROBLEM TO BE SOLVED: To provide an inertia sensor capable of being easily miniaturized using a simple structure. SOLUTION: An acceleration sensor 1 includes a sensor body 3 and a detection means 5. The detection means comprises an elastic member 17, a magnetic field direction sensing element 19 and a magnetic field generating element 21, and the elastic member is held to the sensor body at its both end parts in a free state. The magnetic field direction sensing element is a spin-valve type GMR element, and attached to a movable part of the elastic member, and the magnetic field generating element is mounted at the sensor body at a position in opposition to the magnetic field direction sensing element. The sensor body includes a pair of left and right holding frames 7, 9 holding the elastic member, and a pair of upper and lower top plates 11, 13 holding the holding frames, and the holding frames and the top plates are composed of ceramics. COPYRIGHT: (C)2006,JPO&NCIPI
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