| 摘要 |
PROBLEM TO BE SOLVED: To provide a heating device reduced in variation in temperature distribution and reduced in in temperature lowering by a non-condensable gas. SOLUTION: A heating container 13 has a heating part 13a for heating a heated object and an accumulating part 14b for accumulating the non-condensable gas of a heat medium 11 heated by a heating element 15. A vacuum heat insulation case 17 covers a part excluding the heating part for heating the heated object, and is made of a metallic plate, and a part of the metallic plate is a diaphragm 19. COPYRIGHT: (C)2006,JPO&NCIPI
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