| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing tool for corundum to obtain high polishing efficiency and good surface roughness and to perform polishing with small dripping of an end face. SOLUTION: This polishing tool 10 is provided with a metal base plate (tool body) 14 provided with a flat attaching surface, a plurality of grinding tool pieces 16 constituted by binding abrasive grains by prescribed bonding agent and brought into sliding contact with one surface of a workpiece 28, and an elastically deformable elastic sheet 17 disposed with a plurality of grinding tool pieces 16 on one surface and fixed on the attaching surface of the metal base plate 14 on the other surface. The elastic sheet 17 is provided with elasticity having elastic deformation amount of 5 to 25μm when applying surface pressure of 20.4 kPa, that is, 200 g/cm<SP>2</SP>, namely, a compressive elastic deformation ratio of 0.25 to 1.235μm/kPa. When performing mirror surface polishing of a corundum crystalline, the high polishing efficiency can be obtained and the dripping of the end face can be sufficiently reduced. COPYRIGHT: (C)2006,JPO&NCIPI
|
