发明名称 |
Plating of multi-layer structures |
摘要 |
An insulating layer ( 5 ) and a conductive seed layer ( 6 ) are applied to a substrate ( 1 ) in a simple process. A photo resist with palladium chloride are provided in a bath for electrophoretic deposition onto the substrate. The photo resist is an insulator and the palladium chloride is a catalyst. The layer is heated with UV to cure it. The layer is plasma etched to expose more of the palladium chloride, which acts as a catalyst for electrodes plating of the conductive seed layer. A thicker conductive layer ( 7 ) is then electroplated onto the seed layer. These steps may be repeated for successive insulating and/or conductive layers.
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申请公布号 |
US2005233593(A1) |
申请公布日期 |
2005.10.20 |
申请号 |
US20050156544 |
申请日期 |
2005.06.21 |
申请人 |
BRUNET MAGALL;CONNELL ANDREW M;MCCLOSKEY PAUL;O'DONNELL TERENCE;O'REILLY STEPHEN;O'MATHUNA SEAN C |
发明人 |
BRUNET MAGALL;CONNELL ANDREW M.;MCCLOSKEY PAUL;O'DONNELL TERENCE;O'REILLY STEPHEN;O'MATHUNA SEAN C. |
分类号 |
C23C18/18;C23C26/00;C25D1/12;C25D15/00;G11B5/31;H01F17/00;H01F27/28;H05K1/02;H05K3/18;(IPC1-7):H01L21/302 |
主分类号 |
C23C18/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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