发明名称 Method for the production of a bipolar transistor
摘要 The invention relates to a method for producing a bipolar transistor. A semiconductor substrate is provided that encompasses a collector area of a first conductivity type, which is embedded therein and is bare towards the top. A monocrystalline base area is provided and a base-connecting area of the second conductivity type is provided above the base area. An insulating area is provided above the base-connecting area and a window is formed in the insulating area and the base-connecting area so as to at least partly expose the base area. An insulating sidewall spacer is provided in the window in order to insulate the base-connecting area. An emitter layer which forms a monocrystalline emitter area above the base area and a polycrystalline emitter area above the insulating area and the sidewall spacer is differentially deposited and structured, and a tempering step is carried out.
申请公布号 US2005233536(A1) 申请公布日期 2005.10.20
申请号 US20050153062 申请日期 2005.06.15
申请人 BOCK JOSEF;MEISTER THOMAS;STENGL REINHARD;SCHAFER HERBERT 发明人 BOCK JOSEF;MEISTER THOMAS;STENGL REINHARD;SCHAFER HERBERT
分类号 H01L21/331;H01L29/06;H01L29/08;H01L29/737;(IPC1-7):H01L21/331 主分类号 H01L21/331
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