发明名称 |
Piezoelectric actuator, inkjet head and fabrication methods thereof |
摘要 |
A piezoelectric material layer is easily formed on a partial region of the substrate surface. By forming a different hardness material layer that has a different hardness from that of the substrate in the form of a pattern on the surface of the substrate, a film-deposition permitting region A to which particles of a piezoelectric material in a carrier gas adhere in a form of a film and a film-deposition inhibiting region B which inhibits the formation of a film are provided. Further, when a carrier gas containing particles of a piezoelectric material are ejected onto the surface of the substrate by means of AD, a film-like piezoelectric material layer is formed as a result of the adhesion of the particles in the film-deposition permitting region A. As a result, the piezoelectric material layer can be formed easily in a partial region of the surface of the substrate.
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申请公布号 |
US2005231073(A1) |
申请公布日期 |
2005.10.20 |
申请号 |
US20050083953 |
申请日期 |
2005.03.21 |
申请人 |
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCEAND TECHNOLOGY |
发明人 |
SUGAHARA HIROTO;KOBAYASHI KAZUO;YASUI MOTOHIRO;AKEDO JUN;BABA SOU |
分类号 |
B41J2/14;B41J2/16;H01L41/08;H01L41/22;H01L41/24;(IPC1-7):H01L41/08 |
主分类号 |
B41J2/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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