发明名称 Processing method of thin-film and manufacturing method of thin-film magnetic head
摘要 A processing method of a thin-film includes a step of forming a predetermined pattern film or predetermined elements on a substrate or on a film formed in an upstream process, a step of forming a transparent film over the formed predetermined pattern film or predetermined elements, a step of forming a pattern-transferred film having shapes corresponding to shapes of the formed predetermined pattern film or predetermined elements, on the formed transparent film, and a step of forming an opaque film on the pattern-transferred film.
申请公布号 US2005233260(A1) 申请公布日期 2005.10.20
申请号 US20050065358 申请日期 2005.02.25
申请人 SAE MAGNETICS (H.K.) LTD. 发明人 ISOBE MITSUHARU;UMEHARA HIROMICHI;GOMI HIROTAKA;YOKOZAWA TOMOHIDE
分类号 G11B5/31;G03F7/00;(IPC1-7):G03F7/00 主分类号 G11B5/31
代理机构 代理人
主权项
地址