发明名称 |
Processing method of thin-film and manufacturing method of thin-film magnetic head |
摘要 |
A processing method of a thin-film includes a step of forming a predetermined pattern film or predetermined elements on a substrate or on a film formed in an upstream process, a step of forming a transparent film over the formed predetermined pattern film or predetermined elements, a step of forming a pattern-transferred film having shapes corresponding to shapes of the formed predetermined pattern film or predetermined elements, on the formed transparent film, and a step of forming an opaque film on the pattern-transferred film.
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申请公布号 |
US2005233260(A1) |
申请公布日期 |
2005.10.20 |
申请号 |
US20050065358 |
申请日期 |
2005.02.25 |
申请人 |
SAE MAGNETICS (H.K.) LTD. |
发明人 |
ISOBE MITSUHARU;UMEHARA HIROMICHI;GOMI HIROTAKA;YOKOZAWA TOMOHIDE |
分类号 |
G11B5/31;G03F7/00;(IPC1-7):G03F7/00 |
主分类号 |
G11B5/31 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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