Intensifying pulsed magnetron discharge in a vacuum chamber comprises deflecting an additional electron stream from an additional electron source to a first electrode so that ions are formed in the region of the electrode

摘要

Intensifying a pulsed magnetron discharge in a vacuum chamber (3) comprises deflecting an additional electron stream from an additional electron source (9) to a first electrode (1) for a part of each time period, in which the first electrode is operated non cathodically, so that ions are formed in the region of the first electrode. An independent claim is also included for a device for operating a pulsed magnetron discharge in a vacuum chamber. Preferred Features: The first electrode alternates as a cathode or anode. A hollow cathode is used as the additional electron source. A thin layer is formed on a substrate using magnetron sputtering.