| 摘要 |
PROBLEM TO BE SOLVED: To provide a fan filter unit which can reduce noise generated by turbulence caused by a reflux by reducing losses in a passage by preventing the reflux by reducing a clearance between an airblasting fan mounted within the fan filter unit and an orifice mounted at an air lead-in inlet, and control an increase in cost and shorten development times by reducing the number of components for forming the passage and facilitating the constitution of the passage. SOLUTION: The fan filter unit has the airblasting fan 5 within a chamber 1, and the airblasting fan is formed by a main plate 2, a side plate 3, and a plurality of blades 4. Then the orifice 8 attached at the air lead-in inlet 7 is mounted on one side of the chamber 1, and a filter 9 and a blow-out opening 10 are mounted on the other side of the chamber. In order to reduce the clearance between the airblasting fan 5 and the orifice 8, a circumferential convexity is mounted on the inner side of the orifice 8, thus the high-efficiency fan filter unit with low noise can be obtained. COPYRIGHT: (C)2006,JPO&NCIPI
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