Semiconductor wafer used in microelectronics comprises a mechanical getter, an oxide layer and a polycrystalline layer on its rear side

摘要

Semiconductor wafer comprises a mechanical getter, an oxide layer and a polycrystalline layer on its rear side. The oxide and polycrystalline layers extend up to an edge region of the wafer and cover this edge region. An independent claim is also included for: a process for the production of the semiconductor wafer.