CARRIER SUBSTRATE WITH A THERMOCHROMATIC COATING

摘要

Numerous embodiments of a carrier substrate having thermochromatic materials (100) are described. In one embodiment of the present invention, a carrier substrate (100) has a visible surface, and a thermochromatic material is disposed near the carrier substrate. The thermochromatic material produces a visual change of the visible surface when an activation temperature of the thermochromatic material is reached. target power and wafer bias.